Research on the optimization method of top-drive variable-capacitance micromotors

Abstract

As a class of important MEMS devices, electrostatic micromotors can be used as a platform for developing micropumps, microgyroscopes, micro propeller, and micro medical tools etc. The researches about the electrostatic micromotors in the past twenty years were mainly focused on the actuation principle and fabrication technics. In this paper, the optimal design method for top-drive variable capacitance electrostatic micromotors (TDVCM) is investigated and an analytical model for calculating the output torque of the TDVCM is presented. Using the analytical model, the design parameters of TDVCM can be optimized without the finite element analysis, such that the design procedure has better efficiency in calculation time. In order to verify the numerical calculation accuracy of the method proposed in this paper, the optimizing procedure of an 8/6 TDVCM with various kinds of simple excitation schemes is presented, and the optimization results are verified by the finite element analysis.