Research on the Equivalent Circuit of Coplanar Dielectric Barrier Discharge and Discharge Characteristics

Abstract

Coplanar dielectric barrier discharge can generate a thin layer of diffuse plasma with high power density in the ambient air, which has a wide range of applications in fields such as material surface modification and so on. An equivalent circuit model is crucial for the in-depth study of relevant parameters and discharge characteristics of coplanar dielectric barrier discharge plasma. On the basis of the traditional equivalent circuit, a new equivalent circuit of coplanar dielectric barrier discharge is proposed in this paper. The experimentally measured Q-V diagram is interpreted and the electrical parameter equations are derived using the equivalent circuit. Finally, the effect of applied voltage amplitude on discharge characteristics is investigated.