Modified equivalent circuit for coplanar dielectric barrier discharge considering undischarged areas

Abstract

Coplanar dielectric barrier discharge has a wide range of potential applications in the domains of material surface modification and other areas by producing a thin layer of diffuse plasma with high power density in the air. For a thorough examination of essential variables and discharge properties of coplanar dielectric barrier discharge plasma, an equivalent circuit model is essential. In this paper, a modified equivalent circuit for coplanar dielectric barrier discharge (CDBD) that took into account both the undischarged part and the parasitic capacitance was developed and discussed. The results showed that in the diffusion phase, the discharge area fraction grew quickly with voltage and caused a significant drop in plasma impedance and burning voltage. As the applied voltage increased, the discharge area fraction tended to saturate, the burning voltage slowly rose, and a lot of micro-discharges with greater diameters were present on the dielectric surface during the saturation phase.