Research on the characteristics of micro planar capacitance sensor for multi wear particle detection

Abstract

Wear particles are rich in information about the running state of mechanical equipment. Identifying wear particles is of great importance for monitoring and maintaining the safety and reliability of mechanical equipment. This paper investigated the characteristics of the micro planar capacitance sensor used for wear particle detection. The structural parameters of the micro planar capacitance sensor were optimized through finite element numerical simulation. The influences of excitation frequency and particle velocity on the sensor characteristics were studied through different experiments. The results show that when the excitation frequency is 1.8 MHz, and the particle velocity is 4 mm/s, the sensor has higher sensitivity for particle recognition. The relationship between the sensor signal pulse width and particle velocity is a power function. The sensor can distinguish and detect various metal and non-metallic particulate pollutants and recognize 78 μm iron particles and 165 μm copper particles. This study provides a new method for wear condition monitoring.