Abstract
The use of nanometre fiso interferometer to measure heterodyne interference signals at the same time for phase and phase element detection and phase-locked frequency multiplication counting is employed here. After a certain logic mixing, a set of measurement results with a certain degree of redundancy can be obtained; the test results can be measured and resolved. The rate is better than 0.1 nm, and the measurement range is not limited by the λ/2 period, thus overcoming the previous problems that is the measurement range of the phase measurement method is limited to one period and the resolution of the phase-locked frequency multiplication counting method is not easy to improve.
Published Version
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