Research on statistical detection method of micro bubbles in transparent layer of quartz crucible based on image processing

Abstract

Quartz crucible is a widely used manufacturing equipment in silicon crystal manufacturing industry, and the detection of its quality has a great influence on the purity of subsequent silicon crystals. In this paper, a machine vision-based bubble detection statistical system for transparent layer of quartz crucible is designed, and an intelligent algorithm for measuring the diameter, area and number of bubbles is proposed. Firstly, the bubble image is filtered and enhanced pre-processing operation to enhance the difference between the bubble and the background, and then the binary contour of the bubble is extracted by using a bubble contour extraction algorithm that fuses the morphological algorithm. In order to improve the accuracy of bubble detection, a curvature-based corner detection algorithm is proposed for overlapping bubbles.The experimental results show that the algorithm can accurately and real-time detect the number and diameter of bubbles. Compared with the connected component algorithm(CCA) and edge chain code information (EDCI) algorithm, the proposed method has lower cost and higher detection efficiency.