Abstract
AlN piezoelectric thin films possess exceptional performance and find extensive applications in the fields of underwater acoustic communication and hydroacoustic sensing. To enhance the output voltage values of AlN piezoelectric thin films and optimize their structure, comprehensive simulations and analyses were carried out by using COMSOL on both circular and square film configurations. These investigations specifically focused on examining the impact of dimensional variations on resonance frequency and output voltage, as well as exploring the relationship between vibration frequency and output voltage. The findings revealed that by employing an appropriate cavity radius, increasing the thickness of the thin film can effectively enhance the output voltage. However, if the thickness surpasses 1.5 μm, the output voltage will gradually decline. Notably, the square film exhibited a significantly higher output voltage measurement of 2158 pm compared to the circular film.
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