Abstract
A ‘Smart’ coating design, based on the incorporation of an AlN piezoelectric thin film sensor into a tribological coating system, has been explained in this paper. As part of the overall coating system, piezoelectric AlN thin films with highly preferred (002) orientations have been deposited by a pulsed closed field unbalanced magnetron sputtering system using Cr, Mo and Pt as the seed/adhesion layer. The texture, orientation and piezoelectric properties of AlN films were characterized by means of x-ray diffraction, field emission scanning electron microscopy and laser interferometry. A Michelson laser interferometer was designed and constructed to obtain the converse piezoelectric response of the deposited AlN thin films. It was found that the incorporation of different seed layers at various working pressure in the sandwiched structure, significantly affected the (002) orientation and the piezoelectric response of AlN thin films.
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