Abstract
A ‘Smart’ coating design, based on the incorporation of an AlN piezoelectric thin film sensor into a tribological coating system, has been explained in this paper. As part of the overall coating system, piezoelectric AlN thin films with highly preferred (002) orientations have been deposited by a pulsed closed field unbalanced magnetron sputtering system using Cr, Mo and Pt as the seed/adhesion layer. The texture, orientation and piezoelectric properties of AlN films were characterized by means of x-ray diffraction, field emission scanning electron microscopy and laser interferometry. A Michelson laser interferometer was designed and constructed to obtain the converse piezoelectric response of the deposited AlN thin films. It was found that the incorporation of different seed layers at various working pressure in the sandwiched structure, significantly affected the (002) orientation and the piezoelectric response of AlN thin films.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
