Research on Piezoelectric Micropump of Combination of Active and Passive Valves

Abstract

In order to improve the output characteristics of active piezoelectric pump valve, Research on dual-chamber tandem piezoelectric pump of combination of active and passive valves is proposed, And dual-chamber tandem piezoelectric pump of combination of active and passive valves is designed and study. The results show that maximum output flow of dual-chamber tandem piezoelectric pump of combination of active and passive valves is 540ml/min, the most output pressure is 27kPa,the maximum output flow of single-cavity active valve piezoelectric pump is 160ml/min;the most output pressure is 9.8kPa, obtained the conclusion that output flow and output pressure of the dual-chamber tandem of combination of active and passive valve is superior to single chamber active valve piezoelectric pump.