Abstract
Optical concentration using a microlens with high diffractive efficiency is an important method to improve the fill factor and performances of visible charge-coupled device (CCD) sensors. In this paper, a 516 × 516 element diffractive microlens array (MLA) on the quartz substrate is designed based on scalar diffraction theory and fabricated by submicrometer photolithography technology and magnetically enhanced reactive ion etching. The integration procedures between the MLA and CCD chip are presented. The fill factor of the visible CCD with the MLA increases by a factor of 2.4 in comparison with that of CCD without the MLA. The measuring results show that the large-scale diffractive MLA is able to improve the detecting sensitivity of CCD sensors.
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