Abstract
In this paper, the angle measurement method of high-precision circular grating is studied. The principle analysis of circular grating angle measurement, the principle analysis of multi reading head, and the design of rotary servo control system are carried out. After analyzing the error model of circular grating angle measurement, the research based on harmonic compensation model is carried out respectively. Aiming at the problem of zero crossing oscillation of compensation algorithm, the piecewise compensation strategy is designed, which fully demonstrates the application value of circular grating angle measurement method in high-precision angle measurement system.
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