Abstract
In photoelectric micro-power supply integrated on chip, the conversion efficiency of solar cell was lower compared with canonical solar cell. In order to improve the conversion efficiency of the solar cell, three technologies (fabricating back surface field, fabricating surfaces texture and reflector) were adopted in integrated process of photoelectric micro-power supply on chip. The relevant theory of the three technologies was introduced. The optimum schedule of the photoelectric micro-power supply integrated on SOI wafer was proposed. The conversion efficiency of solar cells was analyzed by simulation tools (PC1D). The results prove the conversion efficiency of solar cells was improved from 9. 34% to 13.3%.
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