Research on Computer Controlled Optical Surfacing (CCOS) Working Function at Wear State

Abstract

The distribution of working pressure in CCOS has been studied when the polishing disc frayed. Combined with the planetary motion, the working functions at wear and ideal states were calculated separately, the result shows that the function peak is higher at wear state and it is a convex curve instead of a concave curve at ideal state. The impact of different wear loss on the working function has been also studied in this paper, one preliminary conclusion has been obtained that with the increasing of the wear loss, the working function peak will get higher and sharper, and the effective range of processing will decrease meanwhile. It can be predicted that although the removal rate may not change obviously at the initial stage of wear, the processing quality may decrease and the processing stability will be worse since the variation of the removal distribution.