Abstract
A grating interferometer is presented based on the quasi-Littrow configuration. We mainly use a plane mirror to make the measuring light reflect and diffract between the mirror and grating scale for several times. According to the grating Doppler shift, the more times that measuring light diffracted, the higher optical subdivision can be obtained. As an example, a grating interferometer with an optical subdivision factor of 1/12 is designed. This work provides a technique to increase the resolution of the grating interferometer, which should be interesting for high precision measurement.
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