Abstract
The results of studies of the physical and mechanical properties of nitride and carbide multilayer systems based on ((TiZrNbTa)N, depending on the methods of deposition and heat treatment are analyzed and summarized. The coatings were deposited by magnetron sputtering. Studies of the original and processed alloy samples were carried out in a regional engineering laboratory. When extremely high doses of N+ ions (1018 cm-2) are introduced into nanostructured coatings (TiZrNbTa)N, a multilayer structure is formed, consisting of amorphous, nanocrystalline (dispersed) and nanostructured layers.The hardness of the coatings decreases to 12 GPa in the near-surface region, and then increases with depth, reaching a maximum of 23 GPa at great depths ≥ 200 nm.Sputtering a small layer of the coating surface, leading to the elimination of the droplet fraction formed during cathode erosion during vacuum-arc sputtering, is the reason for the decrease in the microhardness of the implanted samples.
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