Research of Condensate Resistance Measurement Using Single-Contact Substrate

Tomas Jukna,Jonas Valickas,Vytenis Sinkevicius,Lina Urbanaviciute

doi:10.5755/j01.eee.22.1.14107

Abstract

The research of non-invasive method for condensate resistance measurement uses a substrate with a single-contact area. The novelty of this measurement method lies in the use of electrical current of electrons emitted during the process of electronic emission from an evaporator. Therefore, there is no need of any additional current or voltage source. This study develops a mathematical model describing the performance and dependencies of this method of measurement. The adequacy of this mathematical model was investigated experimentally. For this purpose, the results of direct measurement of substrate condensate resistance were used. DOI: http://dx.doi.org/10.5755/j01.eee.22.1.14107

Highlights

In order to measure the thickness of conductive and semiconductive condensate layers in early formation stages, it is necessary to monitor and control condensate conductivity or resistance
During the measurement the probe is pressed against the plate part on which the conductive material is deposited, and this is the reason why this method is difficult to use in real time
The Van der Pauw measurement method is more suitable for real-time systems, as here four areas prepared for the contact are used

Summary

INTRODUCTION

In order to measure the thickness of conductive and semiconductive condensate layers in early formation stages, it is necessary to monitor and control condensate conductivity or resistance. As the evaporator is powered from a direct current source, electromagnetic and electrostatic fields resulting from the heating current do not divert the electron flow away from the measurement probes and substrates. This helps to reduce the measured voltages and decreases the probability limits for the method under discussion. The setup consisted of a substrate with two contact areas and galvanically isolated source of stabilized current This condensate resistance measurement method is based on the stabilized current, which flows through the substrate used to deposit the material being evaporated. For this research, experiments involved reduced stabilized current allowing to maximize direct measurement limits for condensate resistance

THE EXPERIMENTAL ANALYSIS OF CONDENSATE RESISTANCE MEASUREMENT

CONCLUSIONS