Research and Exploration of Terahertz Feeder Manufacturing Technology Based on Micro-precision Machining

Abstract

With the development of radar towards high frequency, the demand for terahertz waveguides and other devices is gradually increasing. But it is difficult to prepare such high-precision micro-devices by conventional processing methods. This paper summarizes several micromachining methods commonly used in terahertz feeder devices. On this basis, according to the development requirements of a certain type of terahertz waveguide with the characteristic of single-input-four-output, an experimental exploration is carried out. In the development process, the methods of precision NC machining and micro electroforming are comprehensively applied. which breaks through the difficulties of reliable transfer of surface coating and efficient dissolution of micro mold. The sample that meets dimensional accuracy and microwave performance was successfully prepared. The scheme has a reasonable process setting and can promote the engineering application of terahertz waveguide devices.