Abstract

At present high precision aspheric surface has been widely used in high performance optical system, but at current technical condition, the machining of high precision aspheric surface is still difficult. According to the requirement of high precision micro aspheric surface machining, three machining method of spherical wheel machining in micro axisymmetric aspheric has been put forward. And a high precision manufacturing and measurement system based on the machining method mentioned above has been designed and realized. It adopts the technology of tool uniform wear and error compensation, can be chose different machining method, and reach to the requirement of high precision micro aspheric surface machining.

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