Abstract

As a portable standard, two-dimensional optical calibration plate is playing an increasingly important role in precision industry measurement. Therefore, it is of great scientific significance and obvious socioeconomic benefits to carry out the research of comparator. This paper was based on rich experience with the institute in the field of the geometric measurement technology for a long time, the measurement uncertainty of the optical calibration plate was studied, and the measurement uncertainty of the instrument has been researched. The measurement uncertainty of the error of the calibration plate’s setting and marking value was U= (0.14+ 0.015L) m k=2 L: mm.

Highlights

  • With the transformation and upgrading of China's manufacturing industry into the fast lane, the current market for processing products of higher quality requirements, processing enterprises have brought efficiency and quality challenges

  • It is necessary to establish the geometric model of camera imaging used some applications, including machine vision, image measurement, photogrammetry and 3D reconstruction, which can correct the errors caused by lens distortion

  • When the 2d optical calibration board does not specify the origin of central coordinates, its reference axis is composed of the center line of the circle or the center point of the checkerboard in the last row and the first column of the calibration board, respectively, and the reference axis of the calibration board is X axis and the reference axis of the Y axis

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Summary

Introduction

With the transformation and upgrading of China's manufacturing industry into the fast lane, the current market for processing products of higher quality requirements, processing enterprises have brought efficiency and quality challenges. A new product - two-dimensional optical calibration plate has appeared. As an important portable measurement standard, calibration plate has been used more and more in high precision measurement. In this paper, relying on the research of the geometric measurement technology for a long time, and referring to relevant documents [1-5], the measurement uncertainty of the error of the position marking value of two-dimensional optical calibration plate is studied. Calibration plates are often used in the calibration of projection equipment, low-end optical tri-coordinate, etc., or used as mask standard in various kinds of lithography achines. Common calibration plates are shown in FIG.

An optical calibration plate
Origin of coordinates
Measurement characteristics
Check before calibration
Calibration of calibration errors for marked values
Repeatability of coordinate measurement
Expression of calibration results
Recovery time interval
Evaluation and analysis of measurement uncertainty
Composite uncertainty
Conclusions
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