Abstract
The development of replication processes of arrays of diffractive optical elements (DOEs) on planar substrates serving as optical light-guides (OLGs) by soft nano-lithography are described.The master DOE arrays were recorded by holographic interferometry in photoresist on the OLG substrate. These master OLGs carrying nanometer surface-relief grating structures were then transferred into a thermally curable Si-elastomer serving as the molding tool for the production of the replica. The replica were formed by casting UV-curable photopolymers onto a planar substrate inserted into the mold. The replication process variables were then designed and evaluated by the statistical Taguchi technique. The replica OLGs were compared to the master OLGs both in terms of surface flatness and grating fidelity. The results show that optimal processes yielded both good OLG flatness (<λ/2)and high grating fidelity (~1).
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