Repetition Rate Dependence of Ferroelectric Properties of Polycrystalline BiFeO3 Films Prepared by Pulsed Laser Deposition Method

Abstract

Polycrystalline BiFeO3 (BFO) films on Pt/TiO2/SiO2/Si substrate have been prepared by a pulsed laser deposition (PLD) method with various repetition rates. The X-ray diffraction (XRD) pattern observes single-phase perovskite structure with a small secondary phase. While the film-thickness is increased with increasing repetition rates, the grain size increases, and the leakage current reduces. Also, good polarization versus electric field (P-E) hysteresis loops of all polycrystalline BFO films were obtained at room temperature (RT). It is seen that the polarization value (Pr ) practically remains almost constant for all the BFO films, and the coercive field (Ec ) decreases with increasing the film thickness.