Abstract
The current techniques for the measurement of the thickness of films are time consuming or not very reliable when the thickness is in the micron range. In this article, a new noncontacting method for the measurement of the thickness of thin films of various materials is presented. This method relies on the variations of the transmission coefficient of ultrasonic waves through the film. The sensitivity and the relative precision of this measurement can be optimized by an appropriate choice of the ultrasonic frequency according to the range of thicknesses to be measured. The method presented in this article can be set up ‘‘on line’’ for regulating the thickness of the films produced.
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