Abstract
Expanding upon Lakin’s theory by considering the phase shift of the acoustic waves in the metallic layers, we have developed an impedance formula for a piezoelectric layer covered by a finite thickness of metal layers, enabling the precise determination of its resonant and anti-resonant frequencies. Compared to experimental data and 3D finite element simulations, our formula can accurately and quickly predict resonant, anti-resonant frequencies, and bandwidth across a wide range of piezoelectric and metallic layer thickness combinations.
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