Abstract
AbstractA new process has been developed in Paratek Microwave Inc. to formulate stable tunable (Ba, Sr)TiO3 (BST) based thin film material. Varactors, with a co-planar structure, were fabricated by using the new material. The varactor Q of 105 tested at 2 GHz was observed with average tunability of 58 % at 150V (37.5 V/μm). The lifetime tests indicated that this material is very stable under continuous 100 to 150 V dc bias both at the room temperature and in 70 °C environment. Thus, this novel tunable thin film material opens a new avenue to develop high quality tunable microwave devices. Tunable IF filters have been built by using this novel material for microwave backhaul radios and handset applications. Initial results of a RF phase shifter are also included and demonstrate another application of these films.
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