Frequency Agile Microwave Applications Using (Ba,Sr)TiO3/Y3Fe5O12 Multilayer Grown by Pulsed Laser Deposition

Abstract

Abstract(Ba,Sr)TiO3 (BST) thin films have been deposited by pulsed laser deposition (PLD) onto single crystal Y3Fe5O12 (YIG) substrates with/without an MgO buffer layer. The structure and microwave properties of BST films have been investigated as function of substrate orientation and O2 deposition pressures (5-800m Torr). The orientation of BST film is varies with the deposition conditions. The dielectric constant, loss tangent, and change in dielectric constant with an applied electric field have been measured at room temperature using interdigitated capacitors at 0.1 – 20 GHz. Polycrystalline BST films have a high tunability (∼40%) with a dc bias field of 67kV/cm and a dielectric Q (=l/tanδ) between 30 and 40, while (001) oriented BST films have a lower tunability (∼20%) but higher dielectric Q (∼50). A coplanar waveguide transmission line was fabricated from a (001) oriented BST film on (111)YIG which exhibited a 17° differential phase shift with an applied dc bias of 21 kV/cm. An equivalent differential phase shift was achieved with a magnetic field of 160Guass.