Abstract
The relation between friction force and plastic deformation was determined by using FIB (focused ion beam)-processed multipurpose cantilevers for an AFM (atomic force microscope). First, a multipurpose cantilever consisting of a sliding block, parallel leaf spring, and hinge was made by using an FIB. Then, copper pyramids were rubbed against an unmodified area or periodic asperity arrays fabricated on the cantilever under loads of 23 to 960 nN. Under higher loads (∼900 nN), the friction coefficient measured for an asperity array was lower than that for an unmodified area and decreased with decreasing curvature radius of the asperity peak, and the specific volume change rate increased with decreasing curvature radius of the asperity peak.
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