Refractive index and extinction coefficient of doped polycrystalline silicon films in infrared spectrum

Abstract

The refractive index and extinction coefficient in infrared spectrum of the polycrystalline silicon films with different doped dosages, base on the inverse calculation, are obtained by means of utilizing the measured reflectance and transmittance of a layer of material and multilayer films, and the equations derived from photonics and electromagnetic theory. The calculation results demonstrate that the refractive index of the doped polycrystalline silicon films decreases with the doped dosages increasing and the extinction coefficient increases with the doped dosages increasing for a given wavelength. This method used for determining the refractive index and extinction coefficient of the polycrystalline silicon films is effective and has the advantage of that the measured samples are fabricated simply.