Reflection surface x-ray diffraction patterns: k-space images

Abstract

For the past two decades, x-ray diffraction has been utilized for surface structural determination. Unlike reflection high-energy electron diffraction (RHEED) which is a complicated dynamical scattering process, x-ray surface analysis is simple and straightforward due to the kinematic nature of x rays. Using high brilliance x rays from an undulator beamline and a highly sensitive charge coupled device detector, we successfully observed RHEED-like x-ray diffraction patterns. The patterns were recorded during the preparation of Si(111)-(7×7), transformation to Ge/Si(111)-(5×5) and Ge growth. Also, simultaneous measurements of x-ray reflectivity and crystal truncation rods are shown feasible with this technique.