Abstract
High accurate distance measurement currently favors optical techniques. Ellipsometer usually can find the optical properties. The data from the Ellipsometer will transfer to distance data but micro-ellipsometer can provide more accurate than general ellipsometer. The micro-ellipsometer use the back focal plane of an objective lens and measures the optical properties in the different angles. The micro-ellipsometer result is the intensity image. The light reflection model can give us original light reflection images of any objects by determining the refractive index of the material and create a reflection image model. This research created optical reflection models of S i O 2 , Au, Ti and Al.
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