Abstract
Gold nanoparticle (GNP) formation on silicon by low temperature annealing is studied. Thin gold film deposited on (100) Si annealed in argon ambient at temperatures from 200 to 275 °C turns to spherical cap nanoparticles up to 20 nm in height, as revealed by atomic force microscopy. Nanoparticle shape and size distribution depends on the annealing temperature. Visible light reflection spectrum changes strongly with the change of GNP distribution. A model of light reflection from the Si-GNP surface is developed. Numerical simulation of optical reflection spectra is performed. Results show qualitative agreement between experimental and calculated data.
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