Abstract
Pulsed laser deposition in molecular-beam epitaxy environment has been used to grow high quality BaCuO x /CaCuO 2 superlattices. In situ reflection high energy electron diffraction (RHEED) shows that the growth mechanism is two-dimensional. Furthermore, weak but reproducible RHEED intensity oscillations have been monitored during the growth. Ex situ X-ray diffraction spectra confirmed the growth rate deduced from RHEED oscillations. Such results demonstrate that RHEED oscillations can be used, even for (BaCuO x ) 2/(CaCuO 2) 2 superlattices, for phase locking of the growth.
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