Abstract
Variabilities such as threshold voltage, on-current, and subthreshold swing due to random dopant fluctuation (RDF), work function variation (WFV), and line edge roughness (LER) are studied in junctionless (JL) stringer FinFETs and compared with inversion-mode devices using technology computer-aided design analysis. Compared with a conventional JL FinFET, the stringer gate JL FinFET shows suppressed variabilities due to RDF, WFV, and LER with better gate controllability and larger effective gate length, respectively.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have