Abstract
This paper reports on a quantitative evaluation of data in microscopic X-ray fluorescence analysis of metallic objects. A new simple technique reducing the effects caused by the presence of irregularities on the surface is introduced. The algorithm is based on the assumption that the behavior of these irregularities is comparable to local tilting of the object under investigation. In scanning XRF microanalysis, more precise distributions of element concentrations could be obtained. In addition, a relief image of the scanned area can be reconstructed. This image is a picture similar to the eye view of the object from the direction of the detector. The results of measurements of two metallic specimens are presented. The X-ray spectrum of our X-ray tube was experimentally determined, as it was required for accurate calculations.
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