Reduction in crystalline quality anisotropy for non-polar a-plane GaN directly grown on titanium patterned sapphire substrate

Abstract

Nonpolar a-plane GaN films were directly grown on titanium patterned sapphire substrates (Ti-PSS) by metalorganic chemical vapor deposition (MOCVD). It is demonstrated that the GaN film grown on Ti-PSS has superior surface quality and less surface pits than that on flat sapphire substrate. More importantly, the anisotropic behavior of the X-ray rocking curve-full width at half maximum values for the on-axis reflections were significantly improved. It is found that, the increased mosaic block size along m-direction could be the main reason for the reduction in the crystalline quality anisotropy. This work provides a simple and effective method to improve the crystal quality of non-polar GaN films.