Abstract
An electrothermally driven MEMS Pirani gauge with an integrated polymeric (SU-8) thin film is proposed. The structured architecture utilizes the miniaturization advantage of microbridge-type Pirani gauges while combining the lower conduction losses of membrane-based gauges. The integrated polymeric film is highly effective in providing mechanical strength to the metallic resistor and in reducing solid conduction loss to the substrate. Consequently, the dynamic range is extended, and the proposed device shows a wide dynamic range from 40 to 105 Pa. Moreover, biased at 2 mA, the average power consumption of the device is 0.5 mW. Experimental results are in proximity with the simulated results, and the overall footprint of the device is 35 × 7 μm2. The post-CMOS compatible polymer-based Pirani gauge can be used for hermetic characterization for more than three decade-Pa range. The experimentally characterized fusing trend shows that the critical current density for safer operation of the device is 30 mA/μm2.
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