Recovery of Fatigue Damage and Life Prediction by Laser Irradiation Healing Treatment for Copper Film

Abstract

A fatigue life prediction method was investigated after healing fatigue damage by excimer laser irradiation treatment for the damaged copper film. First, the variations of residual fatigue life and strain range for the damaged specimens after laser irradiation healing treatment were analyzed. The results showed that the fatigue damage can be effectively healed by laser irradiation for copper film. The presented healing phenomenon during laser irradiation process showed that the recovery of fatigue damage can result in the improvement in fatigue life for the damaged copper film. Then, based on the fact that the strain concentration factor of copper film had not been changed before and after laser irradiation treatment, a residual fatigue life prediction method was proposed by the local stress transformation. The predicted residual fatigue lives by the proposed method agreed well with the experimental results for copper film after laser irradiation treatment.