Abstract
An annealing process was developed for the practical recover of a purified py-rolytic carbon (PPyC) surface from damage, such as color change and peeling, due to fluorination during exposure to chlorine trifluoride gas at high tempera-tures for the cleaning of a silicon carbide chemical vapor deposition reactor. The PPyC surface was annealed at 900°C for 10 min in ambient nitrogen con-taining oxygen at the concentrations of 0.01% - 20%. The rainbow-like colored surface returned to the dark gray color of the original PPyC. Simultaneously, the thin peeled films disappeared. The Raman spectra showed that the PPyC surface chemical bonding returned to that of the original one. The oxygen concentration as low as 0.01% could recover the PPyC surface along with re-ducing the surface pit formation, when the combination of the exposure to chlorine trifluoride gas and the recovery was repeated.
Highlights
Carbon materials [1] are significantly useful for various applications
An annealing process was developed for the practical recover of a purified pyrolytic carbon (PPyC) surface from damage, such as color change and peeling, due to fluorination during exposure to chlorine trifluoride gas at high temperatures for the cleaning of a silicon carbide chemical vapor deposition reactor
The PPyC has been evaluated as the silicon carbide chemical vapor deposition (CVD) susceptor coating film [4]-[10], because it was shown to be resistant to the chlorine trifluoride (ClF3) gas which was an effective silicon carbide CVD reactor cleaning gas
Summary
The pyrolytic carbon materials are used in the corrosive and high temperature environments They are utilized in a chemical vapor deposition (CVD) reactor which uses highly corrosive gases, such as hydrogen chloride and chlorine trifluoride gases. For this purpose, the useful material is purified pyrolytic carbon (PPyC) which is produced by the pyrolysis of hydrocarbon precursors and an-. Because the graphite surface was reported to be recovered by annealing in ambient nitrogen and in that containing oxygen [9], the practical recovery method for the damaged PPyC should be developed for enabling the recycling of the PPyC-coated parts
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