Abstract

The contradictory nature of increasing the crystallization speed while extending the amorphous stability for phase-change materials (PCMs) has long been the bottleneck in pursuing ultrafast yet persistent phase-change random-access memory. Scandium antimony telluride alloy (ScxSb2Te3) represents a feasible route to resolve this issue, as it allows a subnanosecond SET speed but years of reliable retention of the RESET state. To achieve the best device performances, the optimal composition and its underlying working mechanism need to be unraveled. Here, by tuning the doping dose of Sc, we demonstrate that Sc0.3Sb2Te3 has the fastest crystallization speed and fairly improved data nonvolatility. The simultaneous improvement in such ‘conflicting’ features stems from reconciling two dynamics factors. First, promoting heterogeneous nucleation at elevated temperatures requires a higher Sc dose to stabilize more precursors, which also helps suppress atomic diffusion near ambient temperatures to ensure a rather stable amorphous phase. Second, however, enlarging the kinetic contrast through a fragile-to-strong crossover in the supercooled liquid regime should require a moderate Sc content; otherwise, the atomic mobility for crystal growth at elevated temperatures will be considerably suppressed. Our work thus reveals the recipe by tailoring the crystallization kinetics to design superior PCMs for the development of high-performance phase-change working memory technology.

Highlights

  • Commercialized phase-change random-access memory (PCRAM) stores digital information in the amorphous and crystalline phases of chalcogenide phase-change materials (PCMs), such as Ge2Sb2Te51–3

  • All three as-deposited ScxSb2Te3 films are in amorphous states, and the initial magnitude of the sheet resistance becomes larger as the Sc–Te precursor (Sc) content (x) increases from 0.1 to 0.3, corresponding to the widened energy band gap of the amorphous semiconductor[28]

  • We proved that as the Sc content increases from x = 0.1–0.3 in the ScxSb2Te3 device, the data retention ability of the RESET state can be monotonically enhanced, whereas the SET operation becomes faster

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Summary

Introduction

Commercialized phase-change random-access memory (PCRAM) stores digital information in the amorphous and crystalline phases of chalcogenide phase-change materials (PCMs), such as Ge2Sb2Te51–3. Substitution of traditional working memories, i.e., static random-access memory and DRAM, has long been recognized as impossible[7] owing to the stringent requirements of even faster (sub ~1–10 ns) operating speeds and years of data nonvolatility for PCRAM devices[9,10,11]. Such a speed bottleneck of the PCRAM devices originates from the relatively sluggish crystallization process in

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