Recent developments in scanning electron microscope design

Abstract

Publisher Summary This chapter reviews some improvements in scanning electron microscope (SEMs) resolution with respect to the redesign of its electron lenses. By suitably redesigning a SEM's electron lenses, the on-axis aberrations of the objective lens have typically been reduced by over one order of magnitude, and the resolution has been improved by more than a factor of three. Significant progress has been made, particularly with respect to low voltage scanning electron microscopy. Another area of development is the miniaturization of the scanning electron microscope. Miniature high-resolution electrostatic columns have been proposed for low-voltage applications that measure only a few millimeters high, while permanent magnet miniature columns have been designed that have heights less than 100 mm. These types of developments open up the intriguing possibility of making the column or even the whole SEM portable. Miniature permanent magnet SEM columns raise new portability possibilities. Their development, however, is also dependent on finding viable ways to miniaturize electron guns.