Recent developments in low-energy ion scattering spectroscopy (ISS) for surface structural analysis

Abstract

Recent years have seen significant progress in low-energy ion scattering spectroscopy (ISS) for surface structural analysis. They include the development of impact-collision ion scattering spectroscopy (ICISS) to make quantitative surface structural analysis possible and the use of alkali ions rather than noble-gas ions in ICISS (ALICISS) to avoid the ambiguity of ion neutralization probability. The latest progress is the development of coaxial impact-collision ion scattering spectroscopy (CAICISS) in which a pulsed-beam ion source and a time-of-flight energy analyzer are arranged coaxially so as to take the experimental scattering angle just at 180°. Various characteristics of CAICISS, which are due to (a) the 180° experimental scattering angle, (b) the time-of-flight mode for the energy analysis, and (c) the use of an acceleration tube for scattered ions, are discussed.