Abstract
Thermal processing is an integral part of crystalline silicon (c-Si) solar cell manufacturing technology. It is often applied to achieve diffusion, annealing, oxidation, deposition, or reaction process steps in a production environment. This paper reports recent developments in thermal process technology that enable the industry to improve cell efficiency and manufacturing productivity for the standard c-Si cell technology. Especially, continuous inline thermal equipment is adopted in many critical c-Si cell fabrication stages, from emitter formation by dopant diffusion, contact formation by rapid thermal sintering of metallic pastes, to hydrogen annealing to rescue low-efficiency cells.
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