Abstract
Femtosecond laser processing is fast becoming a pervasive method for fabricating micro/nanostructures because it can be used to produce micro/nanostructures on myriads of materials with high precision and resolution, requires little control over environmental conditions, and is simple to implement. Here, we review recent developments in the use of femtosecond lasers for the fabrication of micro/nanostructures through ablation and two-photon polymerization (TPP). Moreover, the applications of some of the fabricated micro/nanostructures are also discussed. We highlight the advantages of femtosecond laser processing by explaining the underlying principles of laser ablation and TPP. We also show the use of this method to fabricate new devices with outstanding performance in several application realm, such as sensors, optical devices, microfluidic chips, and soft robotics.
Highlights
AND DEVELOPMENT1FABRICATING highly efficient and versatile miniaturized devices, such as biomedical [1], chemical [2], and optical sensors [3] and flexible electronics [4], has considerably progressed in recent years
We have summarized the recent developments of femtosecond laser processing in creating micro/nanostructures and their applications
Femtosecond lasers are suitable for fabricating large-area, albeit they may take a long time, designed micro/nanostructures on various substrates
Summary
FABRICATING highly efficient and versatile miniaturized devices, such as biomedical [1], chemical [2], and optical sensors [3] and flexible electronics [4], has considerably progressed in recent years. Among the various processing methods of femtosecond laser micromachining, ablation processing of the material surface (including surface modification) and two-photon polymerization (TPP) have attracted considerable attention from researchers and have many practical applications. TPP is another important application of femtosecond lasers and is distinct from conventional photopolymerization It allows for the fabrication of 3D micro/nanostructures with resolutions smaller than the diffraction limit. Various micro/nanoscale functional devices with complex 3D structures have been fabricated by femtosecond laser TPP [14,15,16]. Femtosecond lasers are being used to fabricate soft robots, intelligent sensors, and arrays of micro-optical devices, as well as in high-throughput surface modification methods, bionics, and other fields because of their high-resolution 3D processing capability. The advantages and applications of femtosecond laser machining structures will be discussed by reporting the advances of these research fields
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