Real-time imaging with THz fully-customized uncooled amorphous-silicon microbolometer focal plane arrays

Abstract

Terahertz uncooled antenna-coupled microbolometer focal plane arrays are being developed at CEA-LETI for THz imaging and sensing. This detector technology relies on amorphous silicon bolometer know-how and aims at opening the way to real-time video rate 2D imaging, with potential low cost either in fabrication and in operation. First prototypes of 320x240 pixel arrays have been designed for 1-3 THz sensing. Sensors have been fabricated monolithically above CMOS Integrated Circuits while applying only full Si standard silicon processes. We present the results of extensive work of characterization and simulations made to estimate the sensitivity and spectral absorption of these prototypes. Tests of latest real-time imaging with active illumination by QCLs are then reported while explosives samples were placed in an optical set-up in reflection configuration.