High-uniformity post-CMOS uncooled microbolometer focal plane array integrated with active matrix circuit

Abstract

This paper presents a high-uniformity post-CMOS fabricated uncooled microbolometer focal plane array (MFPA) integrated with an active matrix circuit. The active matrix circuit selects the row and column of MFPA, calibrates output offset and gain, and converts the resistance changes of MFPA to the output currents. The active matrix circuit with column-wise transistor-sharing scheme is proposed to improve the output non-uniformity. The output non-uniformity with proposed scheme is reduced to 26%, compared to the conventional scheme.