Abstract
Non c-axis oriented ZnO thin films were grown on quartz substrates via pulsed laser deposition (PLD) through Mn–Li co-doping. Both oxygen pressure (PO2) and growth temperature (Ts) are revealed to have significant effects on the structural properties of the Zn(Mn, Li)O (ZMLO) films. The self-textured film with predominant (101¯1) preferred orientation (PO) is achieved. In addition, using the ZMLO as a buffer layer, the growth of undoped pure ZnO with successive orientation characteristic is realized as well. Emission study was performed for the ZnO layer showing strong near-band-edge emission with minor deep level emission, indicating high optical quality of the ZnO thin film.
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