Abstract
A new SAW resonator design method to reduce resonator size is proposed. The main points of the design are: (1) optimization of transducer-reflector period ratio, in order to adjust the transducer center frequency (fT) to the reflector center frequency (fR), and (2) optimization of the transducer-reflector separation so as to create a satisfactory resonance condition at fR. Small size resonators with groove arrays were designed by the new method. Groove gratings were formed by reactive sputter etching, and miniature SAW resonators of 6 mm length were realized, with high Q value above 2×104 at 145 MHz.
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