Abstract
Ion beam damage combined with nanoscale focused-ion-beam direct milling was used to create manufacturable superconductor–normal–superconductor type (SNS) Josephson junctions in 100-nm-thick MgB2 with TC of 38 K. The junctions show nonhysteretic current–voltage characteristics between 36 and 4.2 K. Experimental evidence for the dc and ac Josephson effects in MgB2 metal-masked ion damage junctions are presented. This technique is particularly useful for prototyping devices due to its simplicity and flexibility of fabrication and has a great potential for high-density integration.
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