Abstract

Channel clogging by particles inside microfluidic LTCC devices for biochemical analytics may lead to critical system pressures especially affecting joints, seals or areas of material transition. Biological contamination by device leaks could become a crucial factor regarding operational safety. Therefore, this hereby presented work deals with technological aspects concerning cavity sealing of microfluidic LTCC- devices. Aluminum oxide cover elements as well as sapphire glasses acting as optical windows for spectroscopic investigations are bonded to microfluidic test modules by different glass solders. Different material combinations are discussed by means of compressive strength experiments. CeramTec GC test samples consisting of four layers with a fired thickness of 1mm and a test area of 33mm2 withstand pressures up to 90bar.

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