Abstract
We developed a real-time motion control and measurement system for a scanning transmission X-ray microscope. The system was designed with an FPGA (field-programmable gate array), which is a programmable, reconfigurable circuit for real-time feature modification. This system enabled specimen stage control driven by a piezoelectric element and precise stage position measurement with a laser interferometer. Programmable hardware processing with FPGA realized high-speed control and measurement that cannot be handled by software processing. This system enables very high-speed control and measurement such as "on the fly" measurement.
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