Abstract
Abstract Coaxial impact-collision ion scattering spectroscopy (CAICISS) is a novel form of low-energy ion scattering spectroscopy (ISS), in which a pulsed-beam low-energy ion source and a time-of-flight ion energy analyzer are placed coaxially so as to cover the experimental scattering angle at 180°. It is demonstrated that CAICISS is useful for monitoring molecular-beam epitaxy (MBE) processes in real time by taking the MBE growth of AlAs on a GaAs(001) substrate as an example.
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